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KAIST nanophotonics

NANOPHONICS HOMEPAGE
Cross-Generation Collaborative Lab
Main: 환영
RESEARCH EQUIPMENT
reservation list
SCANNING ELECTRON MICROSCOPE / ELECTRON BEAM LITHOGRAPHY
Hitachi S-4300, Cold field-emission (FE) gun
Acceleration voltage: 5~30 kV
Electron beam lithography available: Field of view ~100 um at 1k mag.
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예약시스템 활용 (주당 5시간 이내)
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Training을 거쳐 license 획득 후 사용.
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Super-user로 승급 시 활용 시간 증대 가능, 대신 training 의무 발생


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